JPH02105170U - - Google Patents
Info
- Publication number
- JPH02105170U JPH02105170U JP1309189U JP1309189U JPH02105170U JP H02105170 U JPH02105170 U JP H02105170U JP 1309189 U JP1309189 U JP 1309189U JP 1309189 U JP1309189 U JP 1309189U JP H02105170 U JPH02105170 U JP H02105170U
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- cup
- monitor
- faraday cup
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Measurement Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1309189U JPH02105170U (en]) | 1989-02-08 | 1989-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1309189U JPH02105170U (en]) | 1989-02-08 | 1989-02-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02105170U true JPH02105170U (en]) | 1990-08-21 |
Family
ID=31223113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1309189U Pending JPH02105170U (en]) | 1989-02-08 | 1989-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02105170U (en]) |
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1989
- 1989-02-08 JP JP1309189U patent/JPH02105170U/ja active Pending